简介:Thispaperpresentsthedesign,fabrication,andexperimentalcharacterizationofaperistalticmicropump.ThemicropumpiscomposedoftwolayersfabricatedfromPolydimethylsiloxane(PDMS)material.Thefirstlayerhasarectangularchannelandtwovalveseals.Threerectangularminilightweightpiezo-compositeactuatorsareintegratedinthesecondlayer,andusedasactuationparts.Twolayersarebonded,andcoveredbytwoPolymethylMethacrylate(PMMA)plates,whichhelpincreasethestiffnessofthemicropump.Amaximumflowrateof900μL·min-1andamaximumbackpressureof1.8kPaarerecordedwhenwaterisusedaspumpliquid.Wemeasuredthepowerconsumptionofthemicropump.Themicropumpisfoundtobeaprom-isingcandidateforbio-medicalapplicationduetoitsbio-compatibility,portability,bidirectionality,andsimpleeffectivedesign.