简介:A10-MHzfaceshear(FS)squaremicromechanicalresonatorbasedonsilicon-on-insulator(SOI)technologyispresentedinthispaper.InordertoexaminetheimprovementofqualityfactoraswellasmotionalresistanceRxinthisstructure,thecenter-stemanchorisemployedinthisstudy.Thebenefitofanchoringthesquareinthecenter,whichisthenodalpoint,isthattheenergylossesthroughtheanchorcanbeminimized.Hence,aqualityfactorvalueof2.0millionandthemotionalresistanceof8.2kcanbeobtainedwithanFSmoderesonatorviafiniteelement(FE)simulation.TheresultsshowthesignificanceoftheFSmodeinthisdesign,notonlyinitsstructurebutalsoinitssquare-extensionalmodeandLame-mode.Additionally,anSOI-basedfabricationprocessisproposedtosupportthedesign.