简介：

简介：43.10.General;43.15.Standards;43.20.Generallinearacoustics;43.25.Nonlinearacoustics;43.28.Aeroacousticsandatmosphericsound;43.30.Underwatersound;43.35.Ultrasonics,quantumacoustics,andphysicaleffectsofsound;43.38.Transduction,acousticaldevicesforthegenerationand

简介：Simpleandefficientsurfaceacousticwave(SAW)two-portresonatorswithlowinsertionlossandhighQ-valuesonST-Xquartzsubstrateusingacorrosion-proofA1/Au-stripeelectrodestructurearedevelopedforgassensing.Itwascomposedoftwoshortedgratingreflectorsandadjacentintedigitaltransducers(IDT),andanactivemetalfilminthecavitybetweentheIDTsforthesensitivefilmcoating.Thedevicesareexpectedtoprovidegoodprotectiontowardsmetalelectrodeforgassensorsapplicationinchemicallyreactiveenvironments.Excellentdeviceperformanceaslowinsertionloss,highQfactorandsingle-modeareachievedbycarefullyselectingthemetallicelectrodethickness,cavitylengthandacousticaperture.Priortofabrication,thecouplingofmodes(COM)modelwasperformedfordevicesimulationtodeterminetheoptimaldesignparameters.Thefabricatedsingle-modeSAWresonatoratoperationfrequencyof300MHzrangeexhibitsmatchedinsertionlossof~6.5dBandloadedQfactorinthe3000range.Usingthefabricatedresonatorasthefeedbackelement,adualresonator-oscillatorwithexcellentfrequencystability(0.1ppm)wasdevelopedandevaluatedexperimentally,anditissignificantforperformanceimprovementofSAWgassensor.