简介:Basedontheprinciplethatone-endedelectromagneticsurfacewavecandriveaplasmaantenna,therelationbetweentheeffectivelengthofanantennacolumnandtheappliedradiofrequency(RF)powerwasstudiedboththeoreticallyandexperimentally.Thedensitydistributionalongthcantennacolumnaswellastheelectrontemperatureindifferentconditionswereinvestigated.Thecharacteristicsofthereceptionoflocalfrequencymodulated(FM)electromagneticwavebytheplasmaantennawerecomparedwiththatbyacopperantennawithsamedimensions.Theresultsshowthatitisfeasibletotakeplasmaantennasasreceivingones.更多还原
简介:Anovelatmosphericplasmadevicedevelopedinthispaper,whichismoreeffectiveandconvenienttostudytheplasma-initiatedpolymerization(PIP)thanconventionalsetup.Thestructureandmechanismofthedeviceisintroduced.Someplasma-initiatedpolymerizationexperimentsarecarriedoutonthedevice,andtheconversionofAA(Acrylicacid)andAM(Acrylamide)atmospheric(N2)plasmapolymerizationarerespectively89%and94%after120hpostpolymerization,wherebyIRspectraoftheproduct(AA,AM).OurPIPresultareconfirmed.
简介:Wedevelopedaone-dimensionalhybridmodeltosimulatetheDC/RFcombineddrivencapacitivelycoupledplasmaforargondischarges.ThenumericalresultsareusedtoanalyzetheinfluenceoftheDCsourceontheplasmadensitydistribution,ionenergydistributions(IEDs)andionangledistributions(IADs)onboththeRFandDCelectrodes.TheincreaseinDCvoltagedrivesmorehigh-energyionstotheelectrodeappliedtotheDCsource,whichmakestheIEDsattheDCelectrodeshifttowardshigherenergy,andthepeaksintheIADsshifttowardssmallangleregions.Atthesametime,italsodecreasestheionenergyattheRFelectrodeandenlargestheincidentanglesoftheions,whichstriketheRFelectrode.
简介:Ananalyticalstudyispresentedonthemodaldispersioncharacteristics,groupvelocity,andeffectivegroup,aswellasthephaseindexofaternaryonedimensionalplasmaphotoniccrystalforanobliquelyincidentelectromagneticwaveconsideringtheeffectofcollisionsinplasmalayers.Thedispersionrelationisderivedbyusingthetransfermatrixmethodandtheboundaryconditionsbasedonelectromagnetictheory.Thedispersioncurvesareplottedforboththenormalphotonicbandgapstructureandtheabsorptionphotonicbandgapstructure.Itisfoundthattheincreaseintheangleofincidenceshiftsthephotonicbandgaptowardhigherfrequencies.Also,thecutofffrequencyisindependentofcollisions.
简介:Anewtwo-dimensionalstructuremodulationalongc-andb-axeshasbeendiscoveredinsuperconductingsinglecrystalsofBi2.13Sr1.87CuO6+δ(Bi2201)byx-rayscattering.Suchmodulationstructuredoesnotexistinnon-superconductingBi2201singlecrystals.Butinsteadlatticedistortionsareobservedinthea-b-plane.Thisphenomenonmayindicatethatbothstrainrelaxationandchargemodulationinthea-b-planeareimportanttotheoccurrenceofsuperconductivityinthecopperoxides.
简介:Thisworkinvestigatesinternalplasmaprocessparametersusingahairpinresonanceprobeandopticalemissionspectroscopy.ThedependenceofelectrondensityandatomicfluorineonthepercentageofoxygeninanSF6/O2dischargewasmeasuredusingthesemethods.AnRIEOxfordInstruments80pluschamberwasusedfortheexperiments.Twodifferentprocesspowers(100Wand300W)ataconstantpressure(100mTorr)wereused,anditwasfoundthattheopticalemissionintensityofthe703.7nmand685.6nmlinesofatomicfluorineincreasedrapidlyasoxygenwasaddedtotheSF6discharge,reachedtheirmaximumatanO2fractionof20%andthendecreasedwithfurtheradditionofoxygen.TheplasmaelectrondensitywasalsostronglyinfluencedbytheadditionofO2.
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简介:ThisworkinvestigatedC2F6/O2/ArplasmachemistryanditseffectontheetchingcharacteristicsofSiCOHlow-kdielectricsin60MHz/2MHzdual-frequencycapacitivelycoupleddischarge.FortheC2F6/Arplasma,theincreaseinthelow-frequency(LF)powerledtoanincreasedionimpact,promptingthedissociationofC2F6withhigherreactionenergy.Asaresult,fluorocarbonradicalswithahighF/Cratiodecreased.Theincreaseinthedischargepressureledtoadecreaseintheelectrontemperature,resultinginthedecreaseofC2F6dissociation.FortheC2F6/O2/Arplasma,theincreaseintheLFpowerpromptedthereactionbetweenO2andC2F6,resultingintheeliminationofCF3andCF2radicals,andtheproductionofanF-richplasmaenvironment.TheF-richplasmaimprovedtheetchingcharacteristicsofSiCOHlow-kfilms,leadingtoahighetchingrateandasmoothetchedsurface.