简介:ThisworkinvestigatedC2F6/O2/ArplasmachemistryanditseffectontheetchingcharacteristicsofSiCOHlow-kdielectricsin60MHz/2MHzdual-frequencycapacitivelycoupleddischarge.FortheC2F6/Arplasma,theincreaseinthelow-frequency(LF)powerledtoanincreasedionimpact,promptingthedissociationofC2F6withhigherreactionenergy.Asaresult,fluorocarbonradicalswithahighF/Cratiodecreased.Theincreaseinthedischargepressureledtoadecreaseintheelectrontemperature,resultinginthedecreaseofC2F6dissociation.FortheC2F6/O2/Arplasma,theincreaseintheLFpowerpromptedthereactionbetweenO2andC2F6,resultingintheeliminationofCF3andCF2radicals,andtheproductionofanF-richplasmaenvironment.TheF-richplasmaimprovedtheetchingcharacteristicsofSiCOHlow-kfilms,leadingtoahighetchingrateandasmoothetchedsurface.
简介:Thetransportprocessof12CionsinwaterwasstudiedwithSRIMcodeandGeant4toolkit.TheSRIMresultsindicatethatthetransversediffusionof12Cionbeamcausesdistortionofenergydepositalongthebeamdirection.Thedistortionbecomesmorenotableasthetrans-versediffusionincreases.ThesimulationresultsofGeant4indicatethattheinfluenceofsecondaryfragmentsonenergydepositdistributionwouldbethemainfactorcausingthedistortioninhigherenergyrange.Intheregionadjacenttothebeamlinewherethecontributionfrom12Cionsdomi-nates,thecontributionsfromsecondaryfragmentsareignorable.Thefurtherfromthebeamaxistheregionlocates,thelargerthecontributionsfromsecondaryfragments,untilthecontributionsfromsecondaryfragmentsareignorable.Thefurtherfromthebeamaxistheregionlocates,thelargerthecontributionsfromsecondaryfragments,untilthecontributionsfromsecondaryfrag-mentsexceedthatof12C.Amongallthesecondaryfragments,thecontributionsofH,HeandBionsaremostlynotable.Itisalsofoundthatsomepositron-emittingsecondaryfragmentscouldbeveryusefulforpositionemittingtomography(PET).
简介:利用角分辨紫外光电子谱对乙烯和乙炔气体在Ru(1010)表面的吸附及与K的共吸附的研究结果表明:当衬底温度超过200K,乙烯即发生脱氢反应,σCH和σCC能级均向高结合能方向移动。在室温下,σCH和σCC能级位置与乙炔在Ru(1010)表面的吸附时的分子能级完全一致。乙烯发生脱氢反应后的主要产物为乙炔。衬底温度从120K到室温,Ru(1010)表面上乙炔的σCH和σCC能级均未发现变化。室温下乙炔仍然可以在Ru(1010)表面以分子状态稳定吸附。在有K的Ru(1010)表面上,室温时σCC谱峰几乎。碱金属K的存在促进了乙炔的分解。
简介:BasedonthesinglebiasingelectrodeexperimentstooptimizetheconfinementofplasmainthedeviceofKT-5Ctokamak,dual-biasingelectrodeswereinsertedintotheKT5Cplasmaforthefirsttimetoexploretheenhancingeffectsofbiasingandthemechanismsofthebiasing.Bymeansofapplyingdifferentcombinationsofbiasingvoltagesontothedualelectrodes,thechangesofE_r,whicharethekeyfactorforboostinguptheE_r×Bflowshear,wereobserved.Thetimeevolutionshowedthattheinnerelectrodeplayedamajorroleindual-biasing,whichdrewlargercurrentthantheouterone.Theouterelectrodeproducedlittleinfluence.Itturnedoutthatthedual-biasingelectrodeswereaseffectiveasasingleoneinimprovingtheplasmaconfinement,forthemechanismofbiasingwasessentiallyanedgeeffect.
简介:InspiteofthecurrentprevalenceoftheCVD-basedprocesses,theelectricarcremainsaninterestingprocessforthesynthesisofcarbonnanoforms,thankstoitsversatility,robustnessandeasiness.Italsoallowsperformingin-situsubstitutionofcarbonatomsbyhetero-elementsinthegraphenelattice.Ourworkaimstoestablishacorrelationbetweentheplasmaproperties,typeandchemicalcomposition(andthesubstitutionrate)oftheobtainedsingle-wallcarbonnanotubes.TheplasmawascharacterizedbyopticalemissionspectroscopyandtheproductswereanalyzedbyhighresolutiontransmissionelectronmicroscopyandcorelevelElectronEnergy-LossSpectroscopy(EELS).Resultsshowthatahighboroncontentleadstoaplasmatemperaturedecreaseandhinderstheformationofnanotubes.Thiseffectcanbecompensatedbyincreasingthearccurrentand/oryttriumcontent.Theoptimalconditionsforthesynthesisofboron-and/ornitrogen-substitutednanotubescorrespondtoahighaxialplasmatemperatureassociatedtoastrongradialgradient.EELSanalysisconfirmedthattheboronincorporatesintothegraphemelattice.
简介:Anewtwo-dimensionalstructuremodulationalongc-andb-axeshasbeendiscoveredinsuperconductingsinglecrystalsofBi2.13Sr1.87CuO6+δ(Bi2201)byx-rayscattering.Suchmodulationstructuredoesnotexistinnon-superconductingBi2201singlecrystals.Butinsteadlatticedistortionsareobservedinthea-b-plane.Thisphenomenonmayindicatethatbothstrainrelaxationandchargemodulationinthea-b-planeareimportanttotheoccurrenceofsuperconductivityinthecopperoxides.
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