Microstructure and AMR Properties of Permalloy Films Sputtered on (Ni0.81Fe0. 19 )0.66Cr0.34 Buffer

(整期优先)网络出版时间:2004-01-11
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(Ni0.81Fe0.19)0.66Cr0.34hasahighresistivityandacrystalstructureclosetothatofNi0.81Fe0.19.TheelectricalandX-raydiffractionmeasurementsprovethatathinNiFeCrseedlayerinducesawell(111)-orientedNi0.81Fe0.19film.Post-annealingtreatmentimprovesthemagneticpropertiesof(Ni0.81Fe0.19)0.66Cr0.34(45A)/Ni0.81Fe0.19(150A)/Ta(55A)thinfilmpreparedunderadepositionfield,whereastheinter-diffu-sionofNiFe/Tadeterioratesthemagnetoresistancepropertiesofthefilm.