In_2O_3∶SnO_2(ITO)thinfilmswerefabricatedonthesubstrateofflexiblepolyethyleneterephthalate(PET)byDCmagnetronsputteringfromaceramictargetofIn_2O_3/SnO_2(90∶10).PropertiesofthethinfilmswerecharacterizedbyX-raydiffraction(XRD),four-pointprobe,Hall-effectmeasurement,UV-Visspectrophotometer,andscanningelectronmicroscopy(SEM).Theeffectsofsputteringpressure,oxygenpartialpressureanddepositiontemperatureonpropertiesofmicrostructureandoptoelectronicspropertiesofPET/ITOthinfilmswereinvestigatedindetail.High-qualityITOthinfilmsonPETsubstrateswiththeresistivityaslowas8.5×10-4Ω·cmandtheopticaltransmittanceover80%inthevisiblespectrumrangewereobtained.
