WeexaminethesaturationofrelativecurrentgainofIn0.53Ga0.47As/InPsinglephotonavalanchediodes(SPADs)operatedinGeigermode.Thepunch-throughvoltageandbreakdownvoltageoftheSPADscanbemeasuredusingasimpleandaccuratemethod.Theanalysismethodistemperature-independentandcanbeappliedtomostSPADs.