简介:Calibrationofaccelerometerswithimpactexcitationandreferencemethod;CalibrationofSub-lO-nmFlyingHeightUsingtheBumpResponse;COMPRESSORTESTRIGFORMEMS-BASEDTURBOMACHINERY;Designandcontrolofasphericalair-bearingsystemformulti-d.o.f,ball-joint-likeactuators;Designconsiderationforsingle-pole-typewriteheads;Designofa3DCMMwithelasticallyguidedz-axisandx,yaxiswithlessthan2mmABBEoffset
简介:ABSDESIGNANDFLYHEIGHTMODULATIONOFFEMTOSLIDERS;Achievementofnanometricaccuracywithstepper-drivenmachine;AFM/Opticalmetrologyandapplicationforheadanddisk;AIR-BEARINGDESIGNBASEDONGLOBALAPPROXIMATIONCONCEPTS;Air-bearinglinearactuatorforhighlyprecisetracking;Anactiveheadsliderusingapiezoelectriccantileverforinsituflying-heightcontrol……
简介:ACOMPARISONOFGENETICALGORITHMANDSUBREGIONAPPROACH1NTHEOPTIMIZATIONOFSLIDERAIRBEARINGFORSUB-7nmFLYINGHEIGHT;AComparisonoftheGeneticAlgorithmandtheSubregionApproachintheOptimizationofSliderAirBearingsforSub-7-nmFlyingHeight;ALOWTEMPERATURETURBO-BRAYTONCRYOCOOLERFORSPACEAPPLICATIONS;ANEWHELIUMGASBEARINGTURBOEXPANDER;Anewtypeofdisplacementsensorwithpneumaticfeedbacksystem……