简介:Calibrationofaccelerometerswithimpactexcitationandreferencemethod;CalibrationofSub-lO-nmFlyingHeightUsingtheBumpResponse;COMPRESSORTESTRIGFORMEMS-BASEDTURBOMACHINERY;Designandcontrolofasphericalair-bearingsystemformulti-d.o.f,ball-joint-likeactuators;Designconsiderationforsingle-pole-typewriteheads;Designofa3DCMMwithelasticallyguidedz-axisandx,yaxiswithlessthan2mmABBEoffset